Dycor offers a mobile cart system that can be equipped with any type of Dycor residual gas analyzer (RGA). This compact, sturdy cart can also be configured with your choice of inlet manifolds and vacuum pumping systems.
Key features
- Automated start-up of integrated cart system
- Maintains vacuum when moved between sample points for quick start-up, via optional vacuum sentry safety valve.
- Flexible design
- Supports all standard pumping configurations
- Accommodates optional Opto-22 Data Acquisition System
- Supports computer and printer
- Sturdy aluminum frame construction
- Locked storage cabinet for tools, laptop PC, user's manual, etc.
- RGA and inlet manifold at convenient location for easy access
- No tools required to remove smart sensor from cart for attachment to your vacuum chamber/process tool
| Specifications |
| M240 |
|
| Pressure Reduction Inlet Manifold |
Includes all-metal, high conductance valve, bypass valve, and aperture of user’s choice. |
| M240EP |
|
| Pressure Reduction Inlet |
Includes electropneumatic high conductance inlet valve and an electropneumatic bypass valve with aperture of user’s choice. To be used with user’s vacuum or process chamber. Requires a pneumatic supply of 70 psig to operate valves. |
| M250 |
|
| Capillary Inlet Manifold |
Includes all-metal valve and capillary tube. |
| M250EP |
|
| Capillary Inlet Manifold |
with electropneumatic capillary valve. Requires a pneumatic supply of 70 psig to operate valve. |
| M260 |
|
| Aperture Bypass Inlet Manifold |
Includes valve, bypass tee and aperture of user’s choice. |
| M260EP |
|
| Aperture Bypass Inlet Manifold |
with electropneumatic bypass valve and aperture of user’s choice. |
| VPS70 |
|
| Pumping System |
Includes turbomolecular pumping station with 70 l/s compound turbopump and control with 1.4 CFM roughing pump and autovent valve. |
| VPS70D |
|
| Dry Pumping System |
Includes wide-range turbomolecular pumping station with 70 l/s compound turbopump and control with 0.42 CFM diaphragm roughing pump and autovent valve. To be used when an oil-free pumping system is needed on user’s vacuum or process chamber. |
Refer to the Product Data Sheets in the Documentation tab to see the applicable certifications for this product.