DyMaxion RGA

DyMaxion RGA

Overview

This “zero footprint” Smart Sensor Residual Gas Analyzer has the data acquisition and control electronics mounted directly on the sensor, and can be linked to a computer via either its RS-232 port, or RS-485 port for multiple analyzer instruments.

Ion source options:
Enclosed Ion Source for CVD and atmospheric sampling applications
Conductance Limited Ion Source for PVD applications
Open Ion Source for UHV applications
100, 200, and 300 AMU ranges
Optional on-board analog and Digital I/O
Zero Drift Electrometer Amplifier Technology
On-board diagnostics
RS-232 and RS-485 communications ports

Open Ion Source:

The Open Ion Source is the simplest design and least costly of the ionizer types. It can be inserted directly into the vacuum chamber at pressures of 10-4 Torr. This places the ionizer directly in the sample gas, and because there is no loss in conductance of the sample through the ionizer, the inherent sensitivity is increased.

The Open Ion Source RGA offers increased sensitivity at pressures below 10-4 Torr down to ultra high vacuum with PPM level detectability.

  • Specifications +


    Mass Range 1-100, 1-200, 1-300 AMU
    Operating Pressure Range Ultrahigh vacuum to atmosphere
    Minimum Detectable Partial Pressure 5 x 10-12 Torr ( 5 x 10-14 Torr for electron multiplier units )
    Resolution Adjustable to constant peak width (0.5 AMU at 10% height)
    Emission Current 0.1 to 10 mA; 50 mA to degas
    Electron Energy 30 to 150 volts to operate; 200 volts to degas
    Ion Energy 1 to 10 volts
    Source Sensitivity (Faraday Cup) 2 x 10-4 Amps per Torr at detector (measured with nitrogen at mass 28) with peak width = 0.5 at 10% height and 1 x 10-3 Amps emission current
    Power Requirements 24 VDC @ 3 Amps; 110/220 VAC, 50/60 Hz adaptor available
    Stability
    Mass Stability ± 0.1 AMU after 30 minute warm-up
    Peak Height ± 2% after 30 minute warm-up
    Minimum PC Requirements Windows 98 through Windows 8
    RS-232 Serial Communications
    Interface
    Isolated; baud rate selection of 1200 to 38,400; 9-pin, female D-connectors
    RS-485 Addressable Communications Interface Isolated, baud rate selection of 1200 to 38,400; programmable addresses; 2-pin, female D-connectors
    Optional Analog/Digital I/O Board Includes two analog inputs, two analog outputs, six relay contact closures, and four digital inputs
    Physical Dimensions
    Weight 4.6 lb (2.1 kg) without head
    74. lb (3.4 kg) with head
    Width 4.5 in. (11.4 cm)
    Length 9.0 in. (22.9 cm)
    Height 5.25 in. (13.3 cm)
  • Documents +

  • Special Features +


    Additional features of the Open Ion Source include:

    • Least expensive of the Ionizer choices
    • PPM level detection with only a Faraday Cup detector
    • Ionizer easily replaced in the field in minutes
    • Dual thoriated iridium filament