Dycor DyMaxion Enclosed Ion Source Analyzers

		DyMaxion Enclosed Ion Source Analyzers

The Enclosed Source instrument is designed for CVD processes (and other processes where reactive gases are present) and gas analysis where the gas sample is near or above atmospheric pressure. The primary benefit of this source design is that it eliminates ion-molecule reactions in the source region that occur when reactive gases are introduced at relatively high pressures to the ion volume.

This is accomplished by first reducing the pressure of the sample gas before being introduced to the ion volume. Like the Conductance Limited Source, the sample gas is confined in a relatively small ion volume with the filaments outside the ion volume. The difference is that with the Enclosed Source the sample pressure is first reduced from the high pressure of the CVD (or other high pressure application) to approximately 10^-5 Torr prior to being introduced to the ion volume. Because the gas density is less at this lower pressure, there is a dramatic reduction in ion-molecule reactions when sampling reactive gases. This maintains the original characteristics of the gas sample and eliminates the introduction of new gas species that were not in the original sample.

The Enclosed Ion Source RGA offers increased sensitivity with decreased background noise at system pressures with PPB level detectability.

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Specifications
Mass Range:	1-100, 1-200, 1-300 AMU
Operating Pressure Range:	Ultrahigh vacuum to atmosphere
Minimum Detectable Partial Pressure:	5 x 10^-12 Torr ( 5 x 10^-14 Torr for electron multiplier units )
Resolution:	Adjustable to constant peak width (0.5 AMU at 10% height)
Emission Current:	0.1 to 10 mA; 50 mA to degas
Electron Energy:	30 to 150 volts to operate; 200 volts to degas
Ion Energy:	1 to 10 volts
Source Sensitivity (Faraday Cup):	2 x 10^-4 Amps per Torr at detector (measured with nitrogen at mass 28) with peak width = 0.5 at 10% height and 1 x 10^-3 Amps emission current
Power Requirements:	24 VDC @ 3 Amps; 110/220 VAC, 50/60 Hz adaptor available
Stability
Mass Stability:	± 0.1 AMU after 30 minute warm-up
Peak Height:	± 2% after 30 minute warm-up
Minimum PC Requirements:	Pentium microprocessor or compatible, with Windows 98, ME, NT, 2000, XP, Vista or Win7
RS-232 Serial Communications Interface:	Isolated; baud rate selection of 1200 to 38,400; 9-pin, female D-connectors
RS-485 Addressable Communications Interface:	Isolated, baud rate selection of 1200 to 38,400; programmable addresses; 2-pin, female D-connectors
Optional Analog/Digital I/O Board:	Includes two analog inputs, two analog outputs, six relay contact closures, and four digital inputs
Physical Dimensions
Weight:	4.6 lb (2.1 kg) without head 74. lb (3.4 kg) with head
Width:	4.5 in. (11.4 cm)
Length:	9.0 in. (22.9 cm)
Height:	5.25 in. (13.3 cm)