Thin Film/Semiconductor/PVD

  • DyMaxion Enclosed Ion Source Gas Analyzer
    Dymaxion Enclosed Ion Source Gas Analyzer

    Increased sensitivity and decreased background noise are possible due to the ionizer design. An enclosed ion source operates with sample pressures as high as 10-3 torr with no need for futher pressure reduction of this differentially pumped inlet system. Higher sample pressures contain greater numbers of neutrals and more sample to ionize. With each order of magnitude increase in pressure, signal strength varies proportionally with sample density. This is accomplished by confining the sample within a (relatively) small ionization volume. The sample is constrained within the ion volume that that has a two small slits on either side of the ion volume. Bombarding electrons enter through these slits, ionizing the sample. Ions formed near the small exit hole of the ion volume are immediately extracted into the mass filter, and have little opportunity to react with neutrals. Ionization efficiency is high, since virtually the entire sample passes through the small ionization zone. The main transport mechanism from the source to the downstream mass filter is a pressure gradient, resulting from the higher pressure in the ionizer versus the lower pressure in the downstream mass filter. Hence, the source is conductance limited by the pressure difference.

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  • DyMaxion RGA
    Dymaxion Residual Gas Analyzer

    This “zero footprint” Smart Sensor Residual Gas Analyzer has the data acquisition and control electronics mounted directly on the sensor, and can be linked to a computer via either its RS-232 port, or RS-485 port for multiple analyzer instruments.

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  • Model CG1000 Oxygen Analyzer
    CG1000 Oxygen Analyzer

    The CG1000 is a portable oxygen analyzer designed for industrial and laboratory applications. It has a wide operating range (0.1 ppm to 100% O2, autoranging), a fast response to oxygen changes, and advanced electronic capabilities for easy system integration.

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